Retraction
Design of Component Simulation Platform for Integrated Circuit Manufacturing Equipments
Paper Information
Record ID:
11140
Journal:
Publication Date:
October 22, 2010
Retraction Date:
November 04, 2010
(15.0 years years ago)
Subjects:
Specific Fields:
Business - General Computer Science Technology Engineering - Electrical Mathematics
Business - General Computer Science Technology Engineering - Electrical Mathematics
Institutions:
- State Key Laboratory of Intelligent Technology and Systems, Tsinghua National Laboratory for Information Science and Technology, Department of Computer Science and Technology, Tsinghua University, Beijing, 100084, China
- College of Electronics Engineering, Chongqing University of Posts and Telecommunications, 400065, China
Country:
🇨🇳 ChinaArticle Type:
Publisher:
IEEE: Institute of Electrical and Electronics Engineers
Open Access:
Yes
PubMed ID:
Not indexed in PubMed
Retraction PubMed ID:
Not indexed in PubMed
Retraction Details
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Total Citations:
0
Years Since Retraction:
15.0 years
Open Access:
Yes
Last Checked:
Never